Advances and Applications in Mechanical Engineering and TechnologyAuthor's: Myung-Jin Chung, Sung-Yong Son and Yang-Hee Yee
Pages: [19] - [34]
Received Date: November 15, 2009
Submitted by:
Recently, there is an increasing requirement for controlling linear motion from several ten nanometers to a few hundred of millimeter strokes in the area of the organic light-emitting diode (OLED) display production and inspection equipment. Linear positioning system with direct driving method such as piezoelectric drive and permanent magnet motor could offer significant advantages over conventional linear actuation technologies. Among these direct driving methods, high precision X-Y stage using linear motor is a proper method for long stroke and high accuracy.
linear motor, organic light-emitting diode, plane type X-Y stage, production and inspection.
