References

ON OPTIMIZATION OF MANUFACTURING OF A SENSE-AMPLIFIER BASED FLIP-FLOP MANUFACTURED IN A HETEROSTRUCTURES TO INCREASE DENSITY OF THEIR ELEMENTS. INFLUENCE OF MISMATCH INDUCED STRESS AND POROSITY OF MATERIALS ON TECHNOLOGICAL PROCESS


[1] V. I. Lachin and N. S. Savelov, Electronics, Rostov-on-Don, Phoenix, 2001.

[2] A. Polishscuk, Sovremennaya elektronika, Modern Electronics 12 (2004), 8-11 (in Russian).

[3] G. Volovich, Modern chips UM3Ch class D manufactured by firm MPS, Modern Electronics 2 (2006), 10-17.

[4] A. Kerentsev and V. Lanin, Constructive-technological features of MOSFET-transistors, Power Electronics 1 (2008), 34-38.

[5] A. O. Ageev, A. E. Belyaev, N. S. Boltovets, V. N. Ivanov, R. V. Konakova, Ya. Ya. Kudrik, P. M. Litvin, V. V. Milenin and A. V. Sachenko, Schottky barrier diodes: Specific features of charge transport in rectifying and nonrectifying contacts, Semiconductors 43(7) (2009), 865-871.
DOI: https://doi.org/10.1134/S1063782609070070

[6] Jung-Hui Tsai, Shao-Yen Chiu, Wen-Shiung Lour and Der-Feng Guo, High-performance InGaP/GaAs pnp heterojunction bipolar transistor, Semiconductors 43(7) (2009), 939-942.
DOI: https://doi.org/10.1134/S1063782609070227

[7] O. V. Alexandrov, A. O. Zakhar’in, N. A. Sobolev, E. I. Shek, M. M. Makoviychuk and E. O. Parshin, Formation of donor centers upon annealing of dysprosium-and holmium-implanted silicon, Semiconductors 32(9) (1998), 921-923.
DOI: https://doi.org/10.1134/1.1187515

[8] I. B. Ermolovich, V. V. Milenin, R. A. Red’ko and S. M. Red’ko, Specific features of recombination processes in CdTe films produced in different temperature conditions of growth and subsequent annealing, Semiconductors 43(8) (2009), 980-984.
DOI: https://doi.org/10.1134/S106378260908003X

[9] P. Sinsermsuksakul, K. Hartman, S. B. Kim, J. Heo, L. Sun, H. H. Park, R. Chakraborty, T. Buonassisi and R. G. Gordon, Enhancing the efficiency of SnS solar cells via band-offset engineering with a zinc oxysulfide buffer layer, Applied Physics Letters 102(5) (2013); Article 053901.
DOI: https://doi.org/10.1063/1.4789855

[10] J. G. Reynolds, C. L. Reynolds, Jr. A. Mohanta, J. F. Muth, J. E. Rowe, H. O. Everitt and D. E. Aspnes, Shallow acceptor complexes in p-type ZnO, Applied Physics Letters 102(15) (2013); Article 152114.
DOI: https://doi.org/10.1063/1.4802753

[11] N. I. Volokobinskaya, I. N. Komarov, T. V. Matyukhina, V. I. Reshetnikov, A. A. Rush, I. V. Falina and A. S. Yastrebov, A study of technological processes in the production of high-power high-voltage bipolar transistors incorporating an array of inclusions in the collector region, Semiconductors 35(8) (2001), 974-978.
DOI: https://doi.org/10.1134/1.1393038

[12] E. L. Pankratov and E. A. Bulaeva, Doping of materials during manufacture pn-junctions and bipolar transistors: Analytical approaches to model technological approaches and ways of optimization of distributions of Dopants, Reviews in Theoretical Science 1(1) (2013), 58-82.
DOI: https://doi.org/10.1166/rits.2013.1004

[13] S. A. Kukushkin, A. V. Osipov and A. I. Romanychev, Epitaxial growth of zinc oxide by the method of atomic layer deposition on SiC/Si substrates, Physics of the Solid State 58(7) (2016), 1448-1452.
DOI: https://doi.org/10.1134/S1063783416070246

[14] E. M. Trukhanov, A. V. Kolesnikov and I. D. Loshkarev, Long-range stresses generated by misfit dislocations in epitaxial films, Russian Microelectronics 44(8) (2015), 552-558.
DOI: https://doi.org/10.1134/S1063739715080119

[15] E. L. Pankratov and E. A. Bulaeva, On optimization of regimes of epitaxy from gas phase: Some analytical approaches to model physical processes in reactors for epitaxy from gas phase during growth films, Reviews in Theoretical Science 3(4) (2015), 365-398.
DOI: https://doi.org/10.1166/rits.2015.1041

[16] K. K. Ong, K. L. Pey, P. S. Lee, A. T. S. Wee, X. C. Wang and Y. F. Chong, Dopant distribution in the recrystallization transient at the maximum melt depth induced by laser annealing, Applied Physics Letters 89(17) (2006); Article 172111.
DOI: https://doi.org/10.1063/1.2364834

[17] H. T. Wang, L. S. Tan and E. F. Chor, Pulsed laser annealing of Be-implanted GaN, Journal of Applied Physics 98(9) (2006); Article 094901.
DOI: https://doi.org/10.1063/1.2120893

[18] Yu. V. Bykov, A. G. Yeremeev, N. A. Zharova, I. V. Plotnikov, K. I. Rybakov, M. N. Drozdov, Yu. N. Drozdov and V. D. Skupov, Diffusion processes in semiconductor structures during microwave annealing, Radiophysics and Quantum Electronics 46(8-9) (2003), 749-755.
DOI: https://doi.org/10.1023/B:RAQE.0000025008.97954.1c

[19] Bo Chen, Li Shen, S. Liu, Y. Zheng and J. Gao, A broadband, high isolation millimeter-wave CMOS power amplifier using a transformer and transmission line matching topology, Analog Integrated Circuits and Signal Processing 81(2) (2014), 537-547.
DOI: https://doi.org/10.1007/s10470-014-0412-z

[20] Y. W. Zhang and A. F. Bower, Numerical simulations of island formation in a coherent strained epitaxial thin film system, Journal of the Mechanics and Physics of Solids 47(11) (1999), 2273-2297.
DOI: https://doi.org/10.1016/S0022-5096(99)00026-5

[21] L. D. Landau and E. M. Lefshits, Theoretical Physics 7 (Theory of Elasticity), Physmatlit, Moscow, 2001.

[22] M. Kitayama, T. Narushima, W. C. Carter, R. M. Cannon and A. M. Glaeser, The wulff shape of alumina: I, Modeling the kinetics of morphological evolution, Journal of the American Ceramic Society 83(10) (2000), 2561-2531.
DOI: https://doi.org/10.1111/j.1151-2916.2000.tb01591.x

[23] M. Kitayama, T. Narushima, The wulff shape of alumina: II, Experimental measurements of pore shape evolution rates, Journal of the American Ceramic Society 83(10) (2000), 2572-2583.
DOI: https://doi.org/10.1111/j.1151-2916.2000.tb01592.x

[24] P. G. Cheremskoy, V. V. Slesov and V. I. Betekhtin, Pore in Solid Bodies, Energoatomizdat, Moscow, 1990.

[25] Z. Yu. Gotra, Technology of Microelectronic Devices, Radio and Communication, Moscow, 1991.

[26] P. M. Fahey, P. B. Griffin and J. D. Plummer, Point defects and dopant diffusion in silicon, Reviews of Modern Physics 61(2) (1989), 289.
DOI: https://doi.org/10.1103/RevModPhys.61.289

[27] V. L. Vinetskiy and G. A. Kholodar, Radiative Physics of Semiconductors, Naukova Dumka, Kiev, 1979.

[28] M. G. Mynbaeva, E. N. Mokhov, A. A. Lavrent’ev and K. D. Mynbaev, High-temperature diffusion doping of porous silicon carbide, Technical Physics Letters 34 (2008); Article 731.
DOI: https://doi.org/10.1134/S1063785008090034

[29] Yu. D. Sokolov, About the definition of dynamic forces in the mine lifting, Applied Mechanics 1(1) (1955), 23-35.

[30] E. L. Pankratov, Dopant diffusion dynamics and optimal diffusion time as influenced by diffusion-coefficient nonuniformity, Russian Microelectronics 36(1) (2007), 33-39.
DOI: https://doi.org/10.1134/S1063739707010040

[31] E. L. Pankratov, Redistribution of a dopant during annealing of radiation defects in a multilayer structure by laser scans for production of an implanted-junction rectifier, International Journal of Nanoscience 7(4-5) (2008), 187-197.
DOI: https://doi.org/10.1142/S0219581X08005328

[32] E. L. Pankratov and E. A. Bulaeva, Decreasing of quantity of radiation defects in an implanted-junction rectifiers by using overlayers, International Journal of Micro-Nano Scale Transport 3(3) (2012), 119-130.

[33] E. L. Pankratov and E. A. Bulaeva, Optimization of manufacturing of emitter-coupled logic to decrease surface of chip, International Journal of Modern Physics B 29(5) (2015); Article 1550023.
DOI: https://doi.org/10.1142/S021797921550023X

[34] E. L. Pankratov, On approach to optimize manufacturing of bipolar heterotransistors framework circuit of an operational amplifier to increase their integration rate: Influence mismatch-induced stress, Journal of Computational and Theoretical Nanoscience 14(10) (2017), 4885-4899.
DOI: https://doi.org/10.1166/jctn.2017.6899

[35] E. L. Pankratov and E. A. Bulaeva, An approach to increase the integration rate of planar drift heterobipolar transistors, Materials Science in Semiconductor Processing 34 (2015), 260-268.
DOI: https://doi.org/10.1016/j.mssp.2015.02.054

[36] E. L. Pankratov and E. A. Bulaeva, An approach to manufacture a heterobipolar transistors in thin film structures: On the method of optimization, International Journal of Micro-Nano Scale Transport 4(1) (2014), 17-31.

[37] E. L. Pankratov, Increasing of the sharpness of pn junctions by laser pulses, Nano 6(1) (2011), 31-40.
DOI: https://doi.org/10.1142/S1793292011002329